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Helium Leak Detector
![](../images/img0302_01.jpg)
Manufacturer | ULVAC |
Measurement Gas | Helium |
Minimum detection amount of leakage | 0.1×10-12Pa·㎥/s |
Maximum detection amount of leakage | 0.1×10-3Pa·㎥/s |
Vacuum Exhauster Pump | Rotary Pump (30ℓ/min) |
Available Unit | Pa·㎥/s, mbar·l/s, lusec, Mol/s, atm·cc/s, Torr·l/s, SCCM |
Test Port | NW-25 |