Helium Leak Detector

Manufacturer	ULVAC
Measurement Gas	Helium
Minimum detection amount of leakage	0.1×10-12Pa·㎥/s
Maximum detection amount of leakage	0.1×10-3Pa·㎥/s
Vacuum Exhauster Pump	Rotary Pump (30ℓ/min)
Available Unit	Pa·㎥/s, mbar·l/s, lusec, Mol/s, atm·cc/s, Torr·l/s, SCCM
Test Port	NW-25